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. Author manuscript; available in PMC: 2011 Feb 9.
Published in final edited form as: J Microelectromech Syst. 2010 Jan 1;19(1):215–228. doi: 10.1109/jmems.2009.2032670

TABLE III.

Electrode Parameters for Variable Width and Spacing Electrodes

Element Width (μm) Element Spacing (μm) Electrode Area (mm2)
20 20 20.0
20 50 11.2
20 100 7.0
50 20 29.8
50 50 20.2
50 100 14.2
100 20 34.6
100 50 27.4
100 100 21.4