. Author manuscript; available in PMC: 2011 Feb 22.

Published in final edited form as: J Microelectromech Syst. 2009 Dec;18(6):1184–1197. doi: 10.1109/JMEMS.2009.2031689

TABLE III.

Material Mechanical Properties and Parameters Used in FEM

Material Properties or Parameters	Values
Density of Parylene (kg·m⁻³)	1289 [14]
Density of Parylene (kg·m⁻³)	21450 [25]
Young’s Modulus of Parylene (GN·m⁻²)	2.76[14]
Young’s Modulus of Platinum (GN·m⁻²)	172 [25]
Tensile Strength of Parylene (MN·m⁻²)	68.9[14]
Tensile Strength of Platinum (GN·m⁻²)	4.80 [26]
Poisson’s Ratio of Parylene	0.40 [14]
Poisson’s Ratio of Platinum	0.39 [25]
Applied Pressure (kN·m⁻²)	0.0405
Thickness of Parylene Membrane, L_Parylene (μm)	10.0
Thickness of Platinum, L_Pt (μm)	0.2