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. Author manuscript; available in PMC: 2011 Feb 22.
Published in final edited form as: J Microelectromech Syst. 2009 Dec;18(6):1184–1197. doi: 10.1109/JMEMS.2009.2031689

TABLE IV.

Material Thermal Properties and Parameters Used in Analytical and FEM

Material Properties or Parameters Values
Thermal Conductivity of Parylene, kparylene (W·m−1·K−1) 0.084 [14]
Thermal Conductivity of Glass Tubing, kglass (W·m−1·K−1) 0.937 [27]
Thermal Conductivity of Platinum (W·m−1·K−1) 73.0 [25]
Convection Heat Transfer Coefficient of Air and Parylene
boundary, hair (W·m−2·K−1)
5[28]
Convection Heat Transfer Coefficient of Water and
Parylene boundary, hwater (W·m−2·K−1)
200[28]
Specific Heat of Parylene (J·kg−1·K−1) 0.712 [14]
Specific Heat of Platinum (J·kg−1·K−1) 131.2 [25]
Applied Electrical Power, q (W) 0.0405
Ambient Temperature, T (°C) 25.0
Thickness of Glass Tubing, Lglass (mm) 10.0