Figure 1.

Schematic top view of the MEMS tribometer for studying microscale friction [19]. Several slider types have been investigated, such as the disc-shaped one in this figure. The experiments reported in the current paper have been performed with a square slider, resulting in two parallel sidewall surfaces sliding over one another. The slider surface is 20 μm by 2.0 μm, the counter-surface has the same 2.0 μm height but is much longer. Only the measurement shown in Figure 2 was performed with a small square slider of 4.0 μm by 2.0 μm. [Reprinted with permission from van Spengen, W. M.; Frenken, J. W. M. Tribol. Lett. 2007, 28, 149–156.]