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(A) Scanning electron microscope image of a silicon microcantilever array consisting of eight cantilevers and two sidebars. (B) Schematic drawing of the sensor instrument: 1 - the measurement cell with a mounted microcantilever array, 2 – optical-read out system comprising vertical cavity surface emitting lasers (VCSELs) and a position sensitive detector (PSD), 3 – data processing and acquisition, 4 – valve selector connected to liquid samples.
