| U11 | U22 | U33 | U12 | U13 | U23 | |
| C20 | 0.0666 (14) | 0.0625 (13) | 0.0655 (13) | 0.0059 (10) | 0.0216 (11) | −0.0122 (10) |
| O1 | 0.0514 (8) | 0.0618 (8) | 0.0535 (8) | −0.0039 (6) | −0.0194 (6) | 0.0170 (6) |
| F | 0.0686 (9) | 0.0619 (8) | 0.1021 (11) | −0.0257 (6) | 0.0022 (8) | 0.0114 (7) |
| C1 | 0.0503 (10) | 0.0546 (11) | 0.0470 (10) | −0.0087 (8) | 0.0096 (8) | −0.0091 (8) |
| C2 | 0.0541 (12) | 0.0807 (15) | 0.0623 (13) | −0.0264 (11) | 0.0128 (10) | −0.0206 (11) |
| C3 | 0.0476 (12) | 0.111 (2) | 0.0623 (14) | −0.0190 (13) | −0.0064 (10) | −0.0203 (13) |
| C4 | 0.0501 (12) | 0.0916 (17) | 0.0497 (11) | −0.0018 (11) | −0.0114 (9) | −0.0022 (10) |
| C5 | 0.0411 (9) | 0.0571 (11) | 0.0391 (9) | 0.0006 (8) | −0.0026 (7) | −0.0023 (7) |
| C6 | 0.0451 (9) | 0.0424 (9) | 0.0387 (8) | −0.0015 (7) | −0.0065 (7) | 0.0064 (6) |
| C7 | 0.0374 (8) | 0.0414 (9) | 0.0281 (7) | −0.0010 (6) | −0.0008 (6) | 0.0035 (6) |
| C8 | 0.0375 (8) | 0.0386 (8) | 0.0316 (7) | 0.0014 (6) | 0.0028 (6) | 0.0048 (6) |
| C9 | 0.0382 (9) | 0.0447 (10) | 0.0364 (8) | −0.0022 (7) | 0.0028 (7) | −0.0052 (6) |
| C10 | 0.0396 (8) | 0.0442 (9) | 0.0309 (8) | −0.0015 (7) | −0.0031 (6) | 0.0040 (6) |
| C11 | 0.0512 (10) | 0.0646 (12) | 0.0294 (8) | −0.0137 (9) | −0.0015 (7) | 0.0043 (7) |
| C12 | 0.0343 (8) | 0.0473 (10) | 0.0300 (7) | −0.0023 (7) | −0.0021 (6) | 0.0005 (6) |
| C13 | 0.0386 (9) | 0.0537 (11) | 0.0398 (9) | −0.0001 (7) | 0.0023 (7) | −0.0068 (7) |
| C14 | 0.0385 (9) | 0.0679 (13) | 0.0481 (10) | −0.0096 (8) | 0.0047 (8) | −0.0005 (8) |
| C15 | 0.0448 (10) | 0.0505 (11) | 0.0554 (11) | −0.0122 (8) | −0.0055 (8) | 0.0064 (8) |
| C16 | 0.0533 (11) | 0.0453 (11) | 0.0632 (12) | 0.0009 (8) | −0.0009 (9) | −0.0061 (8) |
| C17 | 0.0401 (9) | 0.0540 (11) | 0.0486 (10) | 0.0000 (8) | 0.0077 (7) | −0.0046 (8) |
| C18 | 0.0481 (10) | 0.0679 (12) | 0.0345 (8) | −0.0039 (9) | 0.0060 (7) | 0.0094 (8) |
| C19 | 0.0403 (9) | 0.0481 (10) | 0.0305 (8) | −0.0058 (7) | −0.0014 (6) | 0.0015 (7) |
| N | 0.0420 (8) | 0.0486 (8) | 0.0280 (6) | −0.0016 (6) | 0.0018 (5) | 0.0029 (5) |
| O2 | 0.0889 (12) | 0.0667 (10) | 0.0364 (7) | 0.0026 (7) | 0.0172 (7) | 0.0078 (6) |
| O3 | 0.0688 (9) | 0.0489 (8) | 0.0502 (7) | 0.0061 (6) | 0.0222 (6) | 0.0000 (6) |