U11	U22	U33	U12	U13	U23
S1	0.0343 (5)	0.0303 (5)	0.0351 (5)	−0.0046 (4)	0.0023 (4)	−0.0016 (4)
O1	0.0403 (16)	0.0408 (16)	0.0313 (14)	0.0000 (12)	0.0036 (12)	0.0104 (12)
O2	0.0460 (17)	0.0450 (17)	0.062 (2)	0.0053 (14)	0.0138 (15)	0.0244 (16)
O3	0.0304 (14)	0.0391 (15)	0.0396 (15)	0.0034 (12)	0.0065 (12)	0.0059 (12)
O4	0.0335 (14)	0.0420 (16)	0.0337 (14)	−0.0013 (13)	0.0022 (11)	−0.0073 (12)
O5	0.0438 (17)	0.0558 (19)	0.0260 (14)	−0.0055 (14)	−0.0006 (12)	0.0038 (13)
N1	0.0257 (15)	0.0240 (15)	0.0263 (15)	−0.0017 (12)	0.0053 (12)	0.0024 (12)
C1	0.0220 (17)	0.0300 (18)	0.0289 (18)	−0.0005 (14)	0.0051 (14)	−0.0049 (15)
C2	0.0265 (18)	0.033 (2)	0.0273 (18)	−0.0005 (15)	0.0080 (14)	−0.0024 (15)
C3	0.0285 (18)	0.036 (2)	0.0268 (18)	0.0060 (16)	0.0076 (14)	0.0044 (15)
C4	0.0243 (17)	0.0300 (19)	0.0294 (18)	0.0035 (15)	0.0087 (14)	0.0009 (15)
C5	0.0285 (19)	0.0283 (19)	0.040 (2)	0.0039 (15)	0.0111 (16)	0.0066 (16)
C6	0.0278 (18)	0.0252 (19)	0.042 (2)	0.0007 (15)	0.0092 (16)	0.0008 (16)
C7	0.0237 (17)	0.0275 (18)	0.0326 (19)	0.0035 (14)	0.0072 (14)	−0.0029 (15)
C8	0.0259 (18)	0.033 (2)	0.039 (2)	−0.0002 (15)	0.0076 (16)	−0.0087 (17)
C9	0.0282 (19)	0.045 (2)	0.031 (2)	0.0022 (17)	0.0004 (15)	−0.0106 (17)
C10	0.039 (2)	0.038 (2)	0.0280 (19)	0.0004 (18)	0.0058 (16)	0.0025 (17)
C11	0.034 (2)	0.0300 (19)	0.0323 (19)	−0.0032 (16)	0.0082 (16)	−0.0041 (16)
C12	0.0220 (17)	0.0298 (19)	0.0303 (18)	0.0010 (14)	0.0065 (14)	−0.0007 (15)
C13	0.0224 (16)	0.0250 (17)	0.0302 (18)	0.0013 (14)	0.0094 (14)	0.0003 (15)
C14	0.0265 (18)	0.0290 (19)	0.0329 (19)	0.0002 (15)	0.0065 (15)	0.0027 (15)
C15	0.035 (2)	0.0271 (19)	0.0325 (19)	−0.0016 (16)	0.0029 (16)	−0.0013 (16)
C16	0.0300 (19)	0.044 (2)	0.0267 (19)	0.0051 (17)	0.0093 (15)	−0.0021 (17)