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Selected XPS data obtained on the films A before and after degermanylation and CuAAC reactions. XPS survey (a) and narrow scan for C1s (b, with deconvolution) of the films A, and narrow scans for Ge3d (c), Si2p (d), F1s (e) and N1s (f, with deconvolution) before (empty circle) and after (solid dot) CuAAC reaction with the CF3-terminated azide 3.
