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. Author manuscript; available in PMC: 2011 Mar 16.
Published in final edited form as: J Micromech Microeng. 2010 Nov 1;20(11):1–8. doi: 10.1088/0960-1317/20/11/115008

Figure 13.

Figure 13

An SEM image of the cross section of a hollow ARROW microfluidic channel after the complete removal of the SU8 polymer core in a piranha mixture with a ratio of (1:1) (H2O2:H2SO4) at 100 °C for 120 h.