Skip to main content
. Author manuscript; available in PMC: 2012 Feb 1.
Published in final edited form as: Anal Chem. 2011 Jan 7;83(3):888–895. doi: 10.1021/ac102566f

Figure 1.

Figure 1

Illustration of the device structures. a, Key steps in the fabrication process, including the etchback step to expose the surface of the devices to the fluid. b, SEM micrograph cross section of a typical nanoplate sensor-heater.