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. Author manuscript; available in PMC: 2011 Dec 3.
Published in final edited form as: J Vac Sci Technol B Nanotechnol Microelectron. 2010 Dec 3;28(6):C6P24–C6P29. doi: 10.1116/1.3517716

Table 2.

UV exposure dose for fabrication of different diameter of PEGDA hydrogel microstructures.

Expected Diameter (μm) Beam dose (mJ/cm2) Diameter (nm)

1 1125 1.01 ± 0.048
1.5 625 1.61 ± 0.06
2 375 1.99 ± 0.10