Table 2.
Expected Diameter (μm) | Beam dose (mJ/cm2) | Diameter (nm) |
---|---|---|
1 | 1125 | 1.01 ± 0.048 |
1.5 | 625 | 1.61 ± 0.06 |
2 | 375 | 1.99 ± 0.10 |
Expected Diameter (μm) | Beam dose (mJ/cm2) | Diameter (nm) |
---|---|---|
1 | 1125 | 1.01 ± 0.048 |
1.5 | 625 | 1.61 ± 0.06 |
2 | 375 | 1.99 ± 0.10 |