Table 3.
track width (µm) | gaps between tracks (µm) | length of HOB (µm) |
---|---|---|
10 ± 2 | 60 ± 4 | 80 ± 9 |
15 ± 2 | 100 ± 3 | 110 ± 10 |
25 ± 4 | 100 ± 5 | 115 ± 11 |
track width (µm) | gaps between tracks (µm) | length of HOB (µm) |
---|---|---|
10 ± 2 | 60 ± 4 | 80 ± 9 |
15 ± 2 | 100 ± 3 | 110 ± 10 |
25 ± 4 | 100 ± 5 | 115 ± 11 |