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a Schematic view of a biochip containing arrays of sub-10 nm functionalized nanodots, arranged in dimers, trimers and extended hexagons with various inter-dot spacings. Each pattern extends over an area of 200 microns. b, Schematic fabrication process flow of AuPd nanodot arrays. c-e. SEM of arrays of dimers, trimers and extended hexagons, respectively.
