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. Author manuscript; available in PMC: 2011 Apr 18.
Published in final edited form as: Small. 2010 Apr 9;6(7):792–806. doi: 10.1002/smll.200901704

Figure 2. Structures fabricated using masked lithography.

Figure 2

a) SEM of a structure with step sizes of 10 and 30 μm etched into a silicon substrate. b) Interdigitated gears of a multilayer microtransmission fabricated using surface micromachining. c) UV-LIGA-fabricated PMMA microstructures exposed to two angled irradiations. d) 3D PMMA scaffold made using X-ray lithography.

Reproduced with permission from Reference [41]. Copyright 1998, IEEE. b) Courtesy of Sandia National Laboratories, Reference [188]. c) Reproduced with permission from Reference [49]. Copyright 1998, American Institute of Physics. d) Reproduced with permission from Reference [55]. Copyright 2006, IOP Publishing.