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. 2011 Mar 30;5(1):013401. doi: 10.1063/1.3528299

Figure 1.

Figure 1

Schematic illustration of the simplified fabrication process for a cell-culture device by using a SU-8 mold and PDMS replication process. (a) Lithography process to define the SU-8 mold pattern. (b) PDMS casting process to pour PDMS onto the SU-8 mold and then to thermally cure the polymer. (c) PDMS replication process to mechanically separate the SU-8 mold and the PDMS replica. (d) Bonding process to bond the PDMS layers and a glass substrate to form a complete microfluidic chip by using an oxygen plasma treatment prior to assembly. [Reprinted with permission from C. W. Huang and G. B. Lee, J. Micromech. Microeng. 17, 1266 (2007). © 2007, Institute of Physics.]