Table 1.

General properties of the different samples used for this study. Series A denotes as-prepared patterned Si surfaces and series B denotes the patterned surfaces after thermal oxidation treatment.

Sample	Flat Si	Oxidized flat Si	A1	B1	A2	B2	A3	B3	A4	B4
Laser fluence (J∕cm2)	⋯		0.34		0.56		0.90		1.69
Roughness ratio	⋯		2.6		3.3		6.0		6.9
Contact angle (deg)	67	25	105	20	121	20	152	0	154	0