U11	U22	U33	U12	U13	U23
S1	0.0823 (4)	0.0302 (3)	0.0389 (3)	0.0073 (2)	0.0114 (3)	−0.0046 (2)
O1	0.1246 (17)	0.0442 (10)	0.0658 (12)	−0.0034 (10)	0.0201 (11)	0.0142 (9)
O2	0.1375 (18)	0.0706 (13)	0.0507 (11)	−0.0010 (12)	0.0386 (11)	0.0165 (9)
O3	0.1253 (16)	0.0596 (11)	0.0457 (10)	0.0000 (10)	0.0324 (10)	−0.0116 (8)
O4	0.1496 (19)	0.0412 (9)	0.0524 (11)	−0.0108 (11)	0.0316 (11)	−0.0044 (8)
O5	0.1047 (13)	0.0309 (8)	0.0490 (9)	−0.0032 (8)	0.0266 (9)	−0.0014 (7)
O6	0.1083 (16)	0.0545 (11)	0.0466 (10)	0.0065 (11)	0.0221 (10)	−0.0072 (9)
N1	0.0725 (14)	0.0516 (12)	0.0452 (11)	−0.0031 (10)	0.0085 (10)	0.0142 (9)
N2	0.0741 (13)	0.0450 (11)	0.0374 (10)	−0.0029 (9)	0.0101 (9)	−0.0037 (8)
N3	0.0430 (9)	0.0269 (8)	0.0320 (8)	0.0018 (7)	0.0057 (7)	−0.0014 (7)
N4	0.0495 (10)	0.0294 (8)	0.0278 (8)	0.0022 (7)	0.0070 (7)	−0.0019 (6)
N5	0.0561 (10)	0.0331 (9)	0.0327 (9)	−0.0012 (7)	0.0063 (7)	0.0004 (7)
N6	0.0429 (9)	0.0296 (8)	0.0315 (8)	0.0024 (7)	0.0038 (7)	−0.0008 (7)
C1	0.0421 (11)	0.0363 (11)	0.0403 (11)	−0.0004 (8)	0.0036 (9)	0.0033 (8)
C2	0.0458 (11)	0.0443 (12)	0.0349 (11)	−0.0030 (9)	0.0042 (9)	0.0102 (9)
C3	0.0495 (12)	0.0506 (12)	0.0316 (10)	−0.0043 (10)	0.0071 (9)	0.0013 (9)
C4	0.0459 (11)	0.0409 (11)	0.0330 (10)	−0.0012 (9)	0.0036 (8)	−0.0025 (8)
C5	0.0390 (10)	0.0375 (10)	0.0325 (10)	−0.0035 (8)	0.0033 (8)	0.0020 (8)
C6	0.0337 (10)	0.0364 (10)	0.0323 (10)	−0.0009 (8)	0.0025 (7)	0.0020 (8)
C7	0.0409 (11)	0.0305 (10)	0.0374 (10)	−0.0013 (8)	0.0041 (8)	−0.0001 (8)
C8	0.0351 (10)	0.0317 (9)	0.0321 (10)	0.0014 (8)	0.0013 (8)	−0.0011 (8)
C9	0.0369 (10)	0.0304 (9)	0.0320 (10)	0.0008 (8)	0.0023 (8)	0.0002 (8)
C10	0.0557 (12)	0.0342 (10)	0.0353 (10)	−0.0034 (9)	0.0044 (9)	0.0017 (8)
C11	0.0602 (13)	0.0287 (10)	0.0403 (11)	0.0009 (9)	0.0073 (9)	−0.0020 (8)
C12	0.0438 (11)	0.0326 (10)	0.0350 (10)	0.0028 (8)	0.0031 (8)	−0.0024 (8)
C13	0.0744 (15)	0.0351 (11)	0.0403 (12)	0.0044 (10)	0.0132 (11)	−0.0043 (9)
C14	0.105 (2)	0.0363 (12)	0.0400 (12)	−0.0073 (12)	0.0160 (12)	0.0025 (10)