U11	U22	U33	U12	U13	U23
Cl1	0.0277 (2)	0.0334 (2)	0.0174 (2)	0.00122 (18)	−0.00259 (17)	0.00550 (16)
O1	0.0322 (7)	0.0251 (6)	0.0350 (7)	0.0091 (6)	−0.0015 (6)	0.0029 (6)
O2	0.0189 (6)	0.0370 (7)	0.0332 (7)	−0.0013 (5)	0.0053 (5)	−0.0070 (6)
O3	0.0446 (8)	0.0466 (8)	0.0216 (7)	−0.0021 (7)	−0.0007 (6)	0.0093 (6)
O4	0.0399 (8)	0.0395 (8)	0.0434 (8)	0.0123 (7)	−0.0068 (7)	0.0168 (7)
O5	0.0250 (6)	0.0402 (7)	0.0341 (7)	−0.0139 (6)	0.0082 (6)	−0.0182 (6)
N1	0.0188 (7)	0.0246 (7)	0.0222 (7)	0.0011 (6)	−0.0029 (6)	−0.0045 (6)
N2	0.0329 (8)	0.0232 (7)	0.0246 (8)	−0.0050 (7)	−0.0055 (7)	0.0064 (6)
N3	0.0220 (7)	0.0285 (7)	0.0209 (7)	−0.0096 (6)	0.0061 (6)	−0.0079 (6)
C1	0.0199 (7)	0.0175 (8)	0.0162 (7)	−0.0048 (7)	−0.0022 (7)	0.0008 (6)
C2	0.0172 (7)	0.0166 (8)	0.0198 (8)	−0.0012 (7)	−0.0015 (6)	−0.0035 (6)
C3	0.0215 (8)	0.0191 (8)	0.0159 (8)	−0.0049 (7)	0.0011 (7)	−0.0026 (6)
C4	0.0244 (8)	0.0141 (7)	0.0187 (8)	−0.0030 (7)	−0.0036 (7)	0.0014 (6)
C5	0.0203 (8)	0.0154 (8)	0.0256 (9)	0.0010 (7)	−0.0010 (7)	−0.0022 (7)
C6	0.0193 (7)	0.0151 (7)	0.0186 (8)	−0.0038 (6)	0.0001 (7)	−0.0048 (6)
C7	0.0205 (8)	0.0189 (8)	0.0228 (9)	−0.0007 (7)	0.0018 (7)	−0.0032 (7)
C8	0.0225 (9)	0.0332 (10)	0.0266 (10)	−0.0106 (8)	0.0062 (8)	−0.0110 (8)
C9	0.0303 (10)	0.0295 (10)	0.0224 (9)	−0.0119 (8)	0.0016 (8)	−0.0023 (7)
C10	0.0308 (9)	0.0256 (9)	0.0258 (9)	−0.0027 (8)	0.0018 (8)	−0.0077 (8)
C11	0.0261 (9)	0.0381 (11)	0.0277 (10)	−0.0018 (8)	0.0076 (8)	−0.0098 (8)
C12	0.0272 (9)	0.0322 (9)	0.0212 (9)	−0.0100 (8)	0.0084 (8)	−0.0058 (8)