Fig. 4.

Arrays of microwells and antibody-conjugated microbeads. (A) SEM image of a small portion of an array of ~0.5 μm wells at a 1.2 μm pitch etched in a silicon dioxide film that was deposited on a gold-coated wafer. (B) Raw fluorescence image of a small portion of an assembled array of 0.4 μm antibody-conjugated beads at a 1.2 μm pitch. (C) SEM image of a small portion of an assembled array of 0.4 μm antibody-conjugated beads at a 1.2 μm pitch. The scale bars in (A) and (C) are 1 μm. The scale bar in (B) is 24 μm.