| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.0283 (3) | 0.0252 (2) | 0.0177 (2) | 0.00033 (19) | 0.00000 (17) | −0.00001 (17) |
| Cl2 | 0.0321 (3) | 0.0321 (3) | 0.0177 (2) | 0.0028 (2) | 0.00405 (18) | 0.00208 (18) |
| O1 | 0.0208 (7) | 0.0300 (7) | 0.0229 (7) | 0.0082 (6) | 0.0024 (5) | 0.0004 (6) |
| N1 | 0.0227 (8) | 0.0170 (7) | 0.0175 (7) | 0.0018 (6) | 0.0019 (6) | 0.0001 (6) |
| C1 | 0.0325 (11) | 0.0186 (9) | 0.0226 (10) | 0.0051 (8) | 0.0020 (8) | 0.0000 (7) |
| C2 | 0.0185 (9) | 0.0194 (9) | 0.0181 (9) | 0.0016 (7) | 0.0020 (7) | 0.0010 (7) |
| C3 | 0.0154 (8) | 0.0177 (9) | 0.0187 (9) | −0.0027 (7) | 0.0025 (7) | 0.0016 (7) |
| C4 | 0.0177 (9) | 0.0164 (9) | 0.0224 (9) | −0.0014 (7) | 0.0021 (7) | −0.0005 (7) |
| C5 | 0.0151 (8) | 0.0172 (8) | 0.0187 (9) | −0.0016 (7) | −0.0007 (7) | −0.0023 (7) |
| C6 | 0.0180 (9) | 0.0196 (9) | 0.0173 (9) | 0.0020 (7) | 0.0017 (7) | −0.0005 (7) |
| C7 | 0.0161 (8) | 0.0173 (8) | 0.0209 (9) | 0.0005 (7) | 0.0016 (7) | 0.0022 (7) |
| C8 | 0.0190 (9) | 0.0154 (8) | 0.0186 (9) | −0.0025 (7) | 0.0028 (7) | 0.0002 (7) |
| C9 | 0.0158 (9) | 0.0175 (9) | 0.0237 (9) | 0.0014 (7) | 0.0015 (7) | −0.0002 (7) |
| C10 | 0.0198 (9) | 0.0211 (9) | 0.0197 (9) | −0.0013 (7) | 0.0049 (7) | −0.0030 (7) |
| C11 | 0.0214 (9) | 0.0175 (9) | 0.0172 (9) | −0.0038 (7) | 0.0008 (7) | −0.0005 (7) |
| C12 | 0.0161 (9) | 0.0191 (9) | 0.0229 (9) | 0.0004 (7) | −0.0001 (7) | 0.0009 (7) |
| C13 | 0.0185 (9) | 0.0198 (9) | 0.0193 (9) | 0.0005 (7) | 0.0056 (7) | −0.0025 (7) |
| C14 | 0.0153 (8) | 0.0160 (8) | 0.0215 (9) | −0.0001 (7) | 0.0001 (7) | −0.0021 (7) |
| C15 | 0.0181 (9) | 0.0154 (8) | 0.0188 (9) | −0.0028 (7) | 0.0007 (7) | −0.0010 (7) |
| C16 | 0.0189 (9) | 0.0195 (9) | 0.0229 (9) | 0.0014 (7) | 0.0011 (7) | 0.0008 (7) |
| C17 | 0.0204 (9) | 0.0213 (9) | 0.0199 (9) | −0.0006 (7) | −0.0033 (7) | 0.0035 (7) |
| C18 | 0.0229 (9) | 0.0173 (9) | 0.0176 (9) | −0.0046 (7) | 0.0027 (7) | 0.0009 (7) |
| C19 | 0.0175 (9) | 0.0192 (9) | 0.0230 (9) | −0.0017 (7) | 0.0019 (7) | −0.0004 (7) |
| C20 | 0.0177 (9) | 0.0193 (9) | 0.0202 (9) | −0.0005 (7) | −0.0015 (7) | 0.0013 (7) |