U11	U22	U33	U12	U13	U23
S1	0.03566 (15)	0.03045 (15)	0.04463 (19)	−0.00315 (11)	−0.00135 (12)	−0.00309 (12)
N1	0.0377 (5)	0.0267 (4)	0.0501 (6)	−0.0007 (4)	−0.0058 (4)	−0.0085 (4)
N2	0.0355 (5)	0.0403 (5)	0.0385 (5)	−0.0137 (4)	0.0015 (4)	−0.0025 (4)
N3	0.0373 (5)	0.0444 (6)	0.0427 (6)	−0.0155 (5)	0.0038 (4)	0.0018 (5)
O1	0.0506 (6)	0.0608 (7)	0.0429 (6)	−0.0006 (5)	0.0011 (4)	−0.0066 (5)
O2	0.0501 (6)	0.0289 (5)	0.0755 (8)	−0.0068 (4)	−0.0021 (5)	0.0035 (5)
O3	0.0651 (7)	0.0711 (8)	0.0380 (5)	−0.0210 (6)	0.0100 (5)	−0.0019 (5)
C1	0.0635 (10)	0.0507 (9)	0.0779 (13)	−0.0091 (8)	0.0196 (9)	−0.0217 (9)
C2	0.0760 (14)	0.0735 (13)	0.0963 (17)	−0.0007 (12)	0.0407 (13)	−0.0193 (13)
C3	0.0481 (9)	0.0836 (14)	0.0844 (14)	−0.0007 (9)	0.0185 (9)	0.0131 (12)
C4	0.0438 (8)	0.0742 (12)	0.0748 (12)	−0.0200 (8)	−0.0020 (8)	0.0052 (10)
C5	0.0452 (7)	0.0516 (8)	0.0561 (9)	−0.0130 (6)	−0.0006 (6)	−0.0089 (7)
C6	0.0352 (5)	0.0330 (6)	0.0457 (7)	−0.0009 (4)	−0.0012 (5)	−0.0021 (5)
C7	0.0296 (5)	0.0273 (5)	0.0457 (7)	−0.0034 (4)	−0.0001 (4)	−0.0027 (5)
C8	0.0384 (6)	0.0372 (6)	0.0587 (9)	−0.0146 (5)	0.0027 (6)	0.0028 (6)
C9	0.0454 (7)	0.0533 (8)	0.0528 (8)	−0.0178 (6)	0.0110 (6)	0.0081 (7)
C10	0.0382 (6)	0.0464 (7)	0.0404 (6)	−0.0082 (5)	0.0076 (5)	0.0017 (5)
C11	0.0288 (5)	0.0326 (5)	0.0400 (6)	−0.0053 (4)	0.0041 (4)	−0.0007 (5)
C12	0.0278 (4)	0.0299 (5)	0.0387 (6)	−0.0046 (4)	0.0019 (4)	−0.0013 (4)
C13	0.0360 (5)	0.0406 (6)	0.0375 (6)	−0.0094 (5)	0.0040 (4)	0.0004 (5)
C14	0.0892 (15)	0.1092 (19)	0.0474 (10)	−0.0299 (14)	0.0152 (10)	0.0098 (11)
C15	0.118 (2)	0.146 (3)	0.0443 (11)	−0.024 (2)	0.0118 (12)	−0.0018 (14)
C16	0.0683 (16)	0.171 (4)	0.165 (3)	−0.012 (2)	0.058 (2)	0.001 (3)