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. Author manuscript; available in PMC: 2011 Jun 27.
Published in final edited form as: J Micromech Microeng. 2006;16(11):2463–2474. doi: 10.1088/0960-1317/16/11/03

Figure 2.

Figure 2

A time history for the response of a microstructure when actuated by (a) a shock force and no electrostatic force and (b) an electrostatic force and no shock force.