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. Author manuscript; available in PMC: 2011 Jun 27.
Published in final edited form as: J Micromech Microeng. 2007;17(7):1360–1370. doi: 10.1088/0960-1317/17/7/019

Figure 10.

Figure 10

Parameter extractions. (a) Force versus deflection curve used to extract the linear stiffness of sample a using the nano-indentation machine. (b) Frequency response of the capacitive accelerometer showing the extracted parameters (damping and natural frequency).