Skip to main content
. Author manuscript; available in PMC: 2011 Jun 27.
Published in final edited form as: J Micromech Microeng. 2007;17(7):1360–1370. doi: 10.1088/0960-1317/17/7/019

Figure 14.

Figure 14

A time history for the response of the capacitive accelerometer when actuated by a half-sine pulse amplitude of 5.0 g for the case of (a) no squeeze film damping (b) including the squeeze film damping effect. The figure shows that the quasi-static shock load (T=25.0 ms) effects the proof mass deflection more than the dynamic shock load (T=5.0 ms), in the presence of squeeze film damping.