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. Author manuscript; available in PMC: 2011 Jun 27.
Published in final edited form as: J Micromech Microeng. 2007;17(7):1360–1370. doi: 10.1088/0960-1317/17/7/019

Figure 15.

Figure 15

Simulation results of the pull-in voltage of the capacitive accelerometer against the shock amplitude of half-sine and full-sine pulses of duration T= 5.0, 25.0, and 45.0 ms.