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. Author manuscript; available in PMC: 2011 Jun 27.
Published in final edited form as: J Micromech Microeng. 2007;17(7):1360–1370. doi: 10.1088/0960-1317/17/7/019

Figure 2.

Figure 2

Variation of the absolute value of the proof mass displacement normalized by the gap spacing underneath the proof mass d for various values of the DC bias VDC.