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. Author manuscript; available in PMC: 2011 Jun 27.
Published in final edited form as: J Micromech Microeng. 2007;17(7):1360–1370. doi: 10.1088/0960-1317/17/7/019

Figure 3.

Figure 3

The transient response of the proof mass of sample a for different voltage values below pull-in (a) and at the pull-in voltage VDC =169.7 V (b) as monitored by a Laser Doppler Vibrometer (blue). Figure b also shows the reading of the induced voltage across the 470 Ω resistor (red).