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. Author manuscript; available in PMC: 2011 Jun 27.
Published in final edited form as: J Micromech Microeng. 2007;17(7):1360–1370. doi: 10.1088/0960-1317/17/7/019

Table 1.

Sensitivity of the switch for selected points on Fig.7b

Shock value (g) Pull in voltage (V) Voltage below pull-in (switch off) (V) Voltage beyond pull in (switch on) (V)
3 132 131.5 132.5
4 123.5 123 124
5 117.5 117 120
6 112 111.7 112.5
7 104 103 105