Table 1.
Sample | Deposition Time (mins) | Thickness of the layer formed (nm) |
---|---|---|
A | 20 | - |
B | 30 | 125.5 |
C | 40 | 196 |
D | 50 | 249.6 |
E | 60 | 312.5 |
Data is for 2.5:1 ratio of APTMS:PFTS
Sample | Deposition Time (mins) | Thickness of the layer formed (nm) |
---|---|---|
A | 20 | - |
B | 30 | 125.5 |
C | 40 | 196 |
D | 50 | 249.6 |
E | 60 | 312.5 |
Data is for 2.5:1 ratio of APTMS:PFTS