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. Author manuscript; available in PMC: 2011 Jul 15.
Published in final edited form as: Conf Proc IEEE Eng Med Biol Soc. 2010;2010:6441–6444. doi: 10.1109/IEMBS.2010.5627335

Fig. 5.

Fig. 5

Fabrication process for suspended micro-bridges. (a) 1 μm SiO2 patterned; (b) 1 μm of sacrificial polysilicon patterned; (c) 150 nm of Si3N4 and (d) 50 nm of SiO2 deposited; (e) 600 nm of polysilicon deposited, doped, and patterned to form heating resistors; (f) 50 nm of SiO2 deposited; (g) etched in hydrofluoric acid; (h) 150 nm Si3N4 is deposited; (i) heater bridges patterned by phosphoric acid etching; (j) aluminium deposited and patterned; (k) potassium hydroxide etches the sacrificial polysilicon and bulk silicon.