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. Author manuscript; available in PMC: 2011 Jul 15.
Published in final edited form as: Conf Proc IEEE Eng Med Biol Soc. 2010;2010:6441–6444. doi: 10.1109/IEMBS.2010.5627335

Fig. 7.

Fig. 7

Fabrication process for in-situ diaphragm formation. (a) SiO2 patterned (b) Deep Isotropic Si etch (c) Photo resist removed (d) Shallow Si etch (e) diaphragm formed, 500 μm diameter, 15 μm deep.