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Average height data, hav, for channels fabricated from various sacrificial cores. The error listed, 2s, corresponds to 95% confidence, and Rs corresponds to average surface roughness.
| Core material | hav (nm) | 2s (nm) | Rs (nm) |
|---|---|---|---|
| Aluminum | 97 | 8 | 5 |
| Aluminum | 53 | 4 | 2 |
| Aluminum | 18 | 1 | 3 |
| Chromium | 98 | 7 | 5 |
| Chromium | 74 | 4 | 3 |
| Germanium | 91 | 10 | 6 |
| Germanium | 56 | 3 | 4 |
