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. Author manuscript; available in PMC: 2011 Aug 4.
Published in final edited form as: Proc IEEE Ultrason Symp. 2010 Oct 11;2010:431–434. doi: 10.1109/ULTSYM.2010.5936010

Figure 7.

Figure 7

Calculated displacement pattern of 169 cells in the CMUT at (a) 0.67 MHz, (b) 1.3 MHz and (c) 4 MHz. Measurement of the displacement of the fabricated CMUT in immersion with an excitation frequency of (d) 0.7 MHz, (e) 1.26 MHz and (f) 4 MHz. The calculation results match well with the displacement measurement.