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. 2011 Jul 6;5(8):6449–6457. doi: 10.1021/nn201649n

Figure 1.

Figure 1

Schematic illustration of the overall process in this study: nanoimprint lithography, plasma etching of residual PMMA layer, wet chemical dissolution of PMGI layer, oblique angle deposition of SiO2, metal deposition, nanoparticle release, and centrifugation. Inset SEM image shows the fabricated nanoparticles after centrifugation.