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. Author manuscript; available in PMC: 2012 May 1.
Published in final edited form as: J Micromech Microeng. 2011 May;21(5):054006. doi: 10.1088/0960-1317/21/5/054006

Figure 2.

Figure 2

(Left) Scanning electron micrograph of a fully released (torsion-beam width = 20 μm) device and (Right) an incompletely released non-functional microactuator (torsion-beam width = 80 μm).