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. Author manuscript; available in PMC: 2012 May 1.
Published in final edited form as: J Micromech Microeng. 2011 May;21(5):054006. doi: 10.1088/0960-1317/21/5/054006

Figure 5.

Figure 5

3D illustrations of a round magnetic microactuator with torsion-beams: (a) without deflection and (b) under the influence of a magnetic field. The angle of device deflection is indicated by φ.