Table 1.
The number of devices tested for resonant frequencies.
| Beam Width [μm] | ||||||
|---|---|---|---|---|---|---|
| 20 | 40 | 60 | 80 | 100 | ||
| Gap [μm] | 5 | 2 | 2 | 3 | 6 | 3 |
| 10 | 3 | 2 | 5 | 4 | 4 | |
| 20 | 4 | 4 | 4 | 3 | 2 | |
| 40 | 3 | 2 | 3 | 3 | 1 | |
| 80 | 2 | 1 | 1 | 1 | 1 | |
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