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. Author manuscript; available in PMC: 2012 Jul 18.
Published in final edited form as: Scanning. 2011 Jul 18;33(3):135–146. doi: 10.1002/sca.20262

Figure 3.

Figure 3

Simulated backscattered electron coefficients η in silicon at low electron energy compared with experimental data (Bronstein and Fraiman, 1969; Joy, 1995a). 1,000,000 electrons were used in the simulations.