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. Author manuscript; available in PMC: 2011 Sep 2.
Published in final edited form as: Rev Sci Instrum. 2006 Jul;77(7):074301–074301-11. doi: 10.1063/1.2219744

FIG. 11.

FIG. 11

Reflectivity of a sample consisting of a 5.5 nm thermal oxide film on silicon measured on the AND/R reflectometer. The data, which yield useful measurements of reflectivity approaching 10−9, were collected in 1.5 days using the 1 in. pencil detector.