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. Author manuscript; available in PMC: 2011 Sep 13.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2010;9(2):023004. doi: 10.1117/1.3378152

Fig. 3.

Fig. 3

Fabrication flow diagram of the process of creating a micropore in a hollow ARROW waveguide.