Table 1.
BCB | Parylene | AlOx-BCB | AlOx-Ad | AlOx-PE | |
---|---|---|---|---|---|
|Vmax| (V) | 60 | 4.5 | 0.4 | 0.8 | 0.75 |
μ (cm2 V−1 s−1) | 5.1 | 4.6 × 10−2 | 3.5 | 3.2 | 2.9 |
VT (V) | 13.2 | −3.5 | −3 × 10−3 | −0.25 | 0.39 |
on/off | >106 | ∼102.5 | ∼102.5 | ∼103 | >103 |
C0 (nF cm−2) | 1.2 | 11.8 | 92.7 | 106 | 133 |
ɛ1[/ɛ2] | 2.65 | 3 | 9/2.65 | 9/3.85 | 9/2.3 |
d1[/d2] (nm) | 2000 | 225 | 52/10 | 52/10 | 52/2 |
W (mm) | 3 | 2 | 3 | 2 | 2 |
L (μm) | 35 | 80 | 50 | 80 | 80 |