U11	U22	U33	U12	U13	U23
S1	0.0546 (3)	0.0466 (3)	0.0211 (2)	0.0092 (2)	−0.00313 (19)	−0.0005 (2)
F1	0.0614 (9)	0.1015 (12)	0.0772 (11)	0.0432 (9)	0.0076 (8)	0.0292 (9)
O1	0.0642 (10)	0.0827 (12)	0.0348 (8)	0.0421 (9)	0.0126 (7)	0.0095 (8)
O2	0.0964 (13)	0.0440 (9)	0.0328 (8)	0.0079 (8)	0.0051 (8)	−0.0095 (6)
C1	0.0391 (10)	0.0436 (11)	0.0250 (9)	0.0089 (8)	−0.0030 (7)	0.0015 (8)
C2	0.0405 (10)	0.0402 (10)	0.0236 (9)	0.0068 (8)	0.0020 (7)	−0.0002 (8)
C3	0.0397 (10)	0.0355 (9)	0.0221 (8)	0.0055 (8)	0.0030 (7)	−0.0021 (7)
C4	0.0414 (11)	0.0377 (10)	0.0255 (9)	0.0067 (8)	0.0030 (8)	0.0034 (8)
C5	0.0663 (15)	0.0639 (14)	0.0234 (9)	0.0235 (12)	0.0089 (9)	0.0072 (9)
C6	0.0748 (17)	0.0814 (18)	0.0303 (11)	0.0408 (14)	0.0184 (11)	0.0079 (11)
C7	0.0547 (13)	0.0611 (14)	0.0318 (10)	0.0276 (11)	0.0077 (9)	0.0044 (9)
C8	0.0509 (13)	0.0587 (14)	0.0317 (10)	0.0169 (11)	0.0019 (9)	0.0042 (9)
C9	0.0413 (10)	0.0338 (9)	0.0263 (9)	0.0012 (8)	0.0033 (7)	0.0064 (7)
C10	0.0562 (13)	0.0401 (11)	0.0437 (12)	0.0099 (10)	−0.0058 (10)	−0.0051 (9)
C11	0.0757 (18)	0.0549 (15)	0.0602 (15)	0.0304 (13)	0.0033 (13)	−0.0061 (12)
C12	0.0417 (12)	0.0598 (14)	0.0506 (13)	0.0160 (10)	0.0065 (10)	0.0224 (11)
C13	0.0521 (13)	0.0600 (14)	0.0416 (12)	0.0059 (11)	−0.0100 (10)	0.0124 (11)
C14	0.0655 (15)	0.0508 (12)	0.0319 (11)	0.0152 (11)	−0.0088 (10)	0.0006 (9)
C15	0.0558 (14)	0.0726 (17)	0.0465 (13)	0.0303 (13)	0.0010 (11)	0.0111 (11)
C16	0.0527 (13)	0.0530 (13)	0.0458 (12)	0.0110 (11)	0.0107 (10)	0.0078 (10)