U11	U22	U33	U12	U13	U23
C1	0.0945 (18)	0.0779 (15)	0.098 (2)	−0.0164 (13)	0.0673 (17)	0.0082 (13)
C2	0.0580 (11)	0.0681 (11)	0.0739 (13)	−0.0036 (9)	0.0375 (10)	0.0104 (10)
C3	0.0488 (8)	0.0364 (7)	0.0431 (8)	0.0012 (6)	0.0268 (7)	−0.0027 (6)
C4	0.0618 (10)	0.0669 (11)	0.0434 (10)	−0.0110 (9)	0.0186 (8)	0.0037 (8)
C5	0.1023 (18)	0.0790 (15)	0.0425 (11)	−0.0110 (13)	0.0172 (11)	0.0081 (10)
C6	0.129 (2)	0.0563 (12)	0.0573 (12)	−0.0166 (12)	0.0570 (14)	−0.0006 (9)
C7	0.0361 (7)	0.0303 (6)	0.0398 (7)	−0.0006 (5)	0.0192 (6)	−0.0018 (5)
C8	0.0429 (8)	0.0365 (7)	0.0377 (8)	0.0052 (6)	0.0193 (7)	0.0000 (6)
C9	0.0379 (7)	0.0364 (7)	0.0381 (7)	0.0036 (5)	0.0186 (6)	−0.0004 (5)
C10	0.0334 (7)	0.0358 (7)	0.0390 (7)	0.0036 (6)	0.0146 (6)	−0.0007 (6)
C11	0.0438 (8)	0.0321 (7)	0.0628 (11)	0.0002 (6)	0.0271 (7)	−0.0025 (7)
C12	0.0438 (8)	0.0399 (8)	0.0655 (11)	0.0089 (7)	0.0298 (8)	0.0003 (7)
C13	0.0322 (7)	0.0448 (8)	0.0474 (9)	0.0027 (6)	0.0155 (6)	0.0056 (6)
C14	0.0415 (8)	0.0352 (8)	0.0521 (9)	−0.0046 (6)	0.0195 (7)	−0.0016 (6)
C15	0.0432 (8)	0.0359 (7)	0.0442 (8)	0.0009 (6)	0.0171 (7)	−0.0056 (6)
C16	0.0520 (10)	0.0602 (11)	0.0747 (14)	−0.0111 (8)	0.0324 (10)	0.0041 (9)
C17	0.0426 (8)	0.0425 (8)	0.0381 (8)	−0.0011 (6)	0.0221 (6)	−0.0006 (6)
C18	0.0497 (9)	0.0449 (9)	0.0386 (8)	−0.0053 (7)	0.0206 (7)	−0.0064 (6)
C19	0.0509 (10)	0.0615 (11)	0.0645 (12)	−0.0068 (9)	0.0166 (9)	−0.0034 (9)
C20	0.0520 (10)	0.0496 (11)	0.0780 (13)	−0.0107 (8)	0.0239 (9)	−0.0131 (9)
N1	0.0395 (6)	0.0323 (6)	0.0473 (7)	−0.0010 (5)	0.0221 (5)	−0.0062 (5)
N2	0.0825 (14)	0.0460 (11)	0.161 (3)	−0.0015 (9)	0.0328 (14)	−0.0037 (12)
O1	0.0618 (7)	0.0393 (6)	0.0584 (7)	−0.0014 (5)	0.0321 (6)	−0.0114 (5)
O2	0.0462 (7)	0.0517 (7)	0.0801 (9)	0.0010 (5)	0.0364 (6)	0.0068 (6)
O3	0.0558 (7)	0.0535 (7)	0.0536 (7)	0.0034 (5)	0.0271 (6)	0.0171 (5)