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. Author manuscript; available in PMC: 2011 Nov 4.
Published in final edited form as: Annu Rev Biomed Eng. 2009;11:235–257. doi: 10.1146/annurev.bioeng.10.061807.160502

Figure 5.

Figure 5

Microfabrication and soft lithography. (a) Photomasks are drawn using a computer-aided design tool and are printed by a high-resolution printer on mylar transparency films. (b) Photoresist-coated silicon wafers are exposed through the photomask and (c) developed to translate the photomask design to the silicon surface. (d) The silicon then serves as a master mold for casting transparent polydimethylsiloxane (PDMS) polymer replicas, which can be (e) drilled to create inlets and outlets and bonded to a glass substrate to create closed microfluidic devices or (f) used to create stencils with micropatterned through-holes.