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. 2011 Jan 31;6(1):108. doi: 10.1186/1556-276X-6-108

Table 1.

Thicknesses of the Al2O3 and SiO2 layers obtained from X-ray reflectrometry on the amorphous and polycrystalline samples

Phase Al2O3 thickness (nm) SiO2 thickness (nm) EOT (nm)
Amorphous 14.6 1.0 7.3
Polycrystalline 12.4 1.2 6.6

The EOT was estimated by considering a permittivity of 9.1 for the Al2O3 layer.