Figure 2.
PL spectra for films annealed for 60 min in a quartz tube furnace. Shown are an ICP CVD film (Siex < 1%) annealed in (a) N2, (b) N2 + 5% H2 and a PECVD film (Siex = 3%) annealed in (c) N2, and (d) N2 + 5% H2.
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