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FLY-XANES spectra for as-deposited (a) PECVD and (b) ICP CVD films at the Si L3,2-edge. The spectra are offset by a constant value in the order they are listed in the legend, in which the excess silicon content of the SRSN films is specified as a percentage. The Si-N resonance peak shifts to lower energies in films with higher excess silicon content.
