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. 2011 Feb 23;6(1):168. doi: 10.1186/1556-276X-6-168

Figure 7.

Figure 7

FLY-XANES spectra at the Si L3,2-edge for a high excess silicon content PECVD film (Siex = 6%) annealed in a quartz tube furnace under N2 ambient gas. The offset spectra are labelled underneath.