U11	U22	U33	U12	U13	U23
S1	0.02654 (19)	0.02354 (19)	0.01549 (17)	−0.00294 (14)	0.00745 (13)	0.00238 (13)
Cl1	0.02154 (19)	0.01854 (19)	0.0719 (3)	−0.00307 (14)	0.02069 (19)	−0.00139 (18)
O1	0.0255 (5)	0.0209 (5)	0.0170 (5)	0.0044 (4)	0.0045 (4)	0.0016 (4)
N1	0.0157 (5)	0.0170 (5)	0.0144 (5)	0.0003 (4)	0.0059 (4)	0.0017 (4)
N2	0.0180 (5)	0.0179 (6)	0.0162 (5)	0.0003 (4)	0.0081 (4)	0.0016 (4)
N3	0.0140 (5)	0.0153 (5)	0.0161 (5)	0.0004 (4)	0.0028 (4)	0.0008 (4)
N4	0.0163 (6)	0.0235 (7)	0.0192 (6)	0.0007 (5)	−0.0010 (5)	0.0016 (5)
C1	0.0179 (6)	0.0130 (6)	0.0152 (6)	0.0001 (5)	0.0049 (5)	−0.0023 (5)
C2	0.0174 (6)	0.0132 (6)	0.0170 (6)	0.0026 (5)	0.0057 (5)	−0.0003 (5)
C3	0.0150 (6)	0.0163 (6)	0.0156 (6)	−0.0007 (5)	0.0045 (5)	−0.0018 (5)
C4	0.0169 (6)	0.0188 (7)	0.0152 (6)	0.0018 (5)	0.0034 (5)	−0.0019 (5)
C5	0.0126 (6)	0.0175 (6)	0.0182 (6)	−0.0024 (5)	0.0060 (5)	−0.0015 (5)
C6	0.0116 (6)	0.0195 (7)	0.0170 (6)	−0.0001 (5)	0.0052 (5)	−0.0017 (5)
C7	0.0173 (7)	0.0196 (7)	0.0219 (7)	−0.0008 (5)	0.0097 (5)	0.0001 (5)
C8	0.0200 (7)	0.0199 (7)	0.0285 (7)	−0.0024 (5)	0.0124 (6)	−0.0054 (6)
C9	0.0231 (7)	0.0336 (8)	0.0204 (7)	0.0000 (6)	0.0081 (6)	−0.0092 (6)
C10	0.0251 (7)	0.0329 (8)	0.0162 (6)	0.0063 (6)	0.0039 (6)	0.0012 (6)
C11	0.0199 (7)	0.0205 (7)	0.0210 (7)	0.0044 (5)	0.0065 (5)	−0.0007 (5)
C12	0.0168 (6)	0.0183 (7)	0.0126 (6)	0.0008 (5)	0.0034 (5)	−0.0026 (5)
C13	0.0182 (7)	0.0168 (7)	0.0282 (7)	−0.0029 (5)	0.0056 (6)	−0.0038 (6)
C14	0.0148 (7)	0.0259 (8)	0.0401 (9)	−0.0008 (6)	0.0087 (6)	−0.0052 (7)
C15	0.0211 (7)	0.0216 (7)	0.0304 (8)	0.0071 (6)	0.0068 (6)	−0.0024 (6)
C16	0.0296 (8)	0.0168 (7)	0.0227 (7)	0.0026 (6)	0.0102 (6)	0.0017 (6)
C17	0.0226 (7)	0.0209 (7)	0.0178 (6)	0.0011 (5)	0.0101 (5)	0.0008 (5)
C18	0.0172 (6)	0.0221 (7)	0.0232 (7)	0.0013 (5)	0.0090 (5)	0.0012 (6)
C19	0.0258 (8)	0.0328 (8)	0.0307 (8)	0.0029 (6)	0.0147 (6)	0.0111 (7)