U11	U22	U33	U12	U13	U23
C1	0.0434 (10)	0.0469 (10)	0.0467 (9)	0.0148 (8)	0.0099 (7)	0.0071 (7)
C2	0.0408 (9)	0.0471 (10)	0.0440 (9)	0.0149 (8)	0.0086 (7)	0.0108 (7)
C3	0.0513 (11)	0.0436 (10)	0.0484 (9)	0.0177 (8)	0.0121 (8)	0.0101 (8)
C4	0.0465 (10)	0.0507 (11)	0.0448 (9)	0.0160 (8)	0.0106 (8)	0.0115 (8)
C5	0.0545 (12)	0.0603 (12)	0.0492 (10)	0.0194 (10)	0.0121 (9)	0.0114 (9)
C6	0.0499 (11)	0.0743 (14)	0.0460 (10)	0.0165 (10)	0.0108 (8)	0.0172 (9)
C7	0.0469 (11)	0.0706 (14)	0.0560 (11)	0.0163 (10)	0.0106 (9)	0.0281 (10)
C8	0.0523 (11)	0.0522 (12)	0.0602 (12)	0.0141 (9)	0.0088 (9)	0.0210 (9)
C9	0.0416 (10)	0.0491 (11)	0.0497 (10)	0.0124 (8)	0.0087 (8)	0.0150 (8)
C10	0.0827 (17)	0.0918 (19)	0.0721 (14)	0.0277 (14)	0.0192 (12)	0.0446 (13)
C11	0.0823 (17)	0.0991 (19)	0.0475 (11)	0.0304 (15)	0.0157 (11)	0.0156 (12)
C12	0.0453 (10)	0.0455 (10)	0.0436 (9)	0.0153 (8)	0.0107 (7)	0.0113 (7)
C13	0.0458 (10)	0.0588 (12)	0.0592 (11)	0.0198 (9)	0.0144 (9)	0.0170 (9)
C14	0.0492 (11)	0.0569 (12)	0.0599 (11)	0.0110 (9)	0.0169 (9)	0.0144 (9)
C15	0.0515 (11)	0.0424 (10)	0.0562 (11)	0.0070 (9)	0.0107 (9)	0.0144 (8)
C16	0.0760 (16)	0.0627 (14)	0.0876 (16)	0.0178 (12)	0.0308 (13)	0.0370 (12)
C17	0.102 (2)	0.0756 (18)	0.114 (2)	0.0372 (16)	0.0319 (17)	0.0595 (16)
C18	0.0805 (17)	0.0698 (16)	0.115 (2)	0.0385 (14)	0.0229 (15)	0.0436 (15)
C19	0.0586 (12)	0.0517 (12)	0.0761 (13)	0.0229 (10)	0.0156 (10)	0.0171 (10)
C20	0.0470 (10)	0.0381 (9)	0.0519 (10)	0.0095 (8)	0.0060 (8)	0.0073 (8)
N1	0.0514 (9)	0.0441 (9)	0.0530 (8)	0.0159 (7)	0.0107 (7)	0.0121 (7)
N2	0.0466 (9)	0.0510 (9)	0.0541 (9)	0.0193 (7)	0.0164 (7)	0.0177 (7)
O1	0.0641 (10)	0.1091 (14)	0.0992 (12)	0.0288 (10)	0.0431 (9)	0.0487 (11)
Cl1	0.0817 (4)	0.0589 (3)	0.0535 (3)	0.0264 (3)	0.0186 (2)	0.0028 (2)